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Registration Number

0209U002029, 0107U007364 , R & D reports

Title

Development of fabrication technology of high-sensitive hymidity sensors based on alumomagnesium spinel with microelectronic treatment of signal.

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Head

Boichuk Vasyl Ivanovych,

Registration Date

09-01-2009

Organization

Drohobych Ivan Franko State Pedagogical University

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The technological map of optimal technological process for fabrication of humidity sensors has been constructed. The methodology of approbation of technology and characterization of the main exploitation parameters of active elements of humidity sensors has been developed. The schematic solution of the level of low and high humidity of microelectronic tranducer has been realized. The complex works on the agreement and commutation of active ceramic elements with microelectronic tranducer have been carried out.

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2020-04-02