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Sarikov Andrey Victorovich. Structural and phase transformations during formation of Si and 3C-SiC based films and nanocomposites
: Доктор фізико-математичних наук :
spec.. 01.04.07 - Фізика твердого тіла :
presented. 2021-09-22; .
VE Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine. – Київ,
0521U101946.
1 documents found
Updated: 2024-09-27