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Registration Number

0215U001366, 0111U007955 , R & D reports

Title

The investigation of the directed radiation from the multi-charged tin plasma in the high-current pulse discharges

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Head

Tseluyko Olexandr Fedorovich, Кандидат фізико-математичних наук

Registration Date

18-02-2015

Organization

Kharkov National University named after V.N. Karazin

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The object of an investigation is the intense directional radiation in the extreme ultraviolet wavelength range from plasma of multiply ionized tin atoms. The project aim is searching and the optimization of conditions for the directional intensity radiation formation with a wavelength of 13.5 nm. The research method is measuring the radiation intensity in the extreme ultraviolet range and wavelength range of 12.2...15.8 nm. In dense multiply ionized plasma of high-current pulsed discharge in the inductive phase the spontaneously directed radiation in the extreme ultraviolet range can arises in the form of short (~ 0.1 µs) thick (~ 1 MW) pulses. Formation conditions of such radiation in the wavelength range of 12.2...15.8 nm from the multiply ionized tin atoms plasma have been theoretically and experimentally investigated in this work. It have been shown that should use pulsed plasma diodes with limited working surface of potential electrode with the current density > 0.1 MA/cm2 and the stored energy of the capacitor bank > 20 J. The directional radiation formation occurs in dense plasma near the potential electrode surface on the background of plasma energy rapid introduction due to formation the double layer of volumetric charge in the current channel. Based on the original method of obtaining images in the extreme ultraviolet range with a time resolution of up to 109 frames/s found that the radiation directivity depends on the form of dense surface plasma. For the longitudinal direction the form looks like the spoke, for the transversal - longitudinally flattened ellipsoid. There is a fundamental difference between the conditions for directional radiation formation in the odd and even half-periods of the discharge current oscillation. A physical model of directional radiation formation in dense plasma of pulsed diode which is based on the stimulated emission theory has been proposed. Ways of manage power and radiation directivity have been determined. It has been theoretically shown that the application of directional radiation sources can significantly increase the nanolithography systems efficiency. Results of research report were introduced into the educational process at the physics and technology department and the computer science department of V.N. Karazin Kharkiv national university.

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Боргун Є.
Гречко Я.
Лісовський В.
Лазурик В.
Лазурик В.
Маслов В.
Целуйко О.

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2020-04-02