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Information × Registration Number 0100U004404, ( 0201U001400  0202U000200  ) R & D request Title The investigation and elaboration of advanced types of vacuum-plasma equipment for thin film deposition. Head Приходько Володимир Іванович, Registration Date 11-10-2000 Organization Scientific Center of Physical Technologies popup.description1 popup.nrat_date 2024-12-11 Close