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Information × Registration Number 0100U006473, R & D request Title Desining of in-situ methods of spectroellipsometric investigation of oxidation of ionic implantation copper's surface and electronic characteristics of subsurface layers Head Поперенко Л.В., Registration Date 19-12-2000 Organization Taras Shevchenko National University of Kyiv popup.description1 popup.nrat_date 2024-12-11 Close
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Desining of in-situ methods of spectroellipsometric investigation of oxidation of ionic implantation copper's surface and electronic characteristics of subsurface layers
Head: Поперенко Л.В.. Desining of in-situ methods of spectroellipsometric investigation of oxidation of ionic implantation copper's surface and electronic characteristics of subsurface layers. Taras Shevchenko National University of Kyiv. № 0100U006473
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Updated: 2026-03-22


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