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Information × Registration Number 0101U004304, ( 0202U002415  0204U000594  ) R & D request Title Development and fabrication of apparatus for part of reactive gas checking in vacuum installations of reactive magnetron sputtering. Head Птушинський Юрій Григорович, Registration Date 03-07-2001 Organization Institute of physics of NAS of Ukraine popup.description1 popup.nrat_date 2024-12-11 Close
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Development and fabrication of apparatus for part of reactive gas checking in vacuum installations of reactive magnetron sputtering.
Head: Птушинський Юрій Григорович. Development and fabrication of apparatus for part of reactive gas checking in vacuum installations of reactive magnetron sputtering.. Institute of physics of NAS of Ukraine. № 0101U004304
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Updated: 2026-03-22


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