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Information × Registration Number 0101U006518, R & D request Title Radical-beam gettering epitaxy - a novel technique in the technology of semiconductor device structures based on multicomponent A3B5 compounds. Head Кидалов Валерій Віталійович, Registration Date 21-09-2001 Organization Berdiansk State Pedagogical University popup.description1 popup.nrat_date 2024-12-11 Close
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Radical-beam gettering epitaxy - a novel technique in the technology of semiconductor device structures based on multicomponent A3B5 compounds.
Head: Кидалов Валерій Віталійович. Radical-beam gettering epitaxy - a novel technique in the technology of semiconductor device structures based on multicomponent A3B5 compounds.. Berdiansk State Pedagogical University. № 0101U006518
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Updated: 2026-03-27


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