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Information × Registration Number 0102U000446, ( 0204U005134  ) R & D request Title Investigation of processes of formation of multicomponent metal and nonmetal coatings by PVD and PECVD methods with using of a non-equilibrium low-temperature plasma. Head Сагалович В.В., Registration Date 06-02-2002 Organization Scientific Center of Physical Technologies popup.description1 popup.nrat_date 2024-12-11 Close
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Investigation of processes of formation of multicomponent metal and nonmetal coatings by PVD and PECVD methods with using of a non-equilibrium low-temperature plasma.
Head: Сагалович В.В.. Investigation of processes of formation of multicomponent metal and nonmetal coatings by PVD and PECVD methods with using of a non-equilibrium low-temperature plasma.. Scientific Center of Physical Technologies. № 0102U000446
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Updated: 2026-03-22


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