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Information × Registration Number 0103U002207, ( 0204U000009  ) R & D request Title Development of high power pulse systems for sputtering of materials on the base of magnetron and arc units and their applying to technological processes for obtaining new thin and thick coatings Head Кузьмичєв Анатолій Іван., Registration Date 22-12-2003 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description1 popup.nrat_date 2024-12-11 Close
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Head: Кузьмичєв Анатолій Іван.. Development of high power pulse systems for sputtering of materials on the base of magnetron and arc units and their applying to technological processes for obtaining new thin and thick coatings. Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI". № 0103U002207
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Updated: 2026-03-25