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Information × Registration Number 0103U006711, ( 0205U000136  ) R & D request Title Development of laser methods of formation nanoscale structures of silicon and research of their radiating properties with the purpose of creation of elements of silicon optoelectronics Head Манойлов Е. Г., Registration Date 17-09-2003 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-11 Close