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Information × Registration Number 0104U009358, R & D request Title Development of an RF generator for use in the device of plasma-photostimulated deposition of films from superhard materials Head Батурін Володимир Андрійович, Registration Date 07-01-2004 Organization Institute of Applied Physics, NAS of Ukraine popup.description1 popup.nrat_date 2024-12-11 Close
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Development of an RF generator for use in the device of plasma-photostimulated deposition of films from superhard materials
Head: Батурін Володимир Андрійович. Development of an RF generator for use in the device of plasma-photostimulated deposition of films from superhard materials. Institute of Applied Physics, NAS of Ukraine. № 0104U009358
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Updated: 2026-03-22


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