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Information × Registration Number 0104U010655, R & D request Title Development and production of device for semiconductor materials polishing Head Лисенко Г. М., Registration Date 22-12-2004 Organization State Enterprise "Special design and technological bureau with experimental production of V.Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine" popup.description1 popup.nrat_date 2024-12-11 Close