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Information × Registration Number 0105U007494, R & D request Title Physical processes and technological modes of interelement isolation formation on semiconductors А3В5 and А4В6 by a method of a polyenergy ionic implantation Head Фреїк Дмитро Михайлович, Registration Date 29-11-2005 Organization Kolomyia Educational-Scientific Institute The Vasyl Stefanyk Precarpathian National University popup.description1 popup.nrat_date 2024-12-11 Close