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Information × Registration Number 0106U003218, ( 0211U009090  ) R & D request Title The interconnection between parameters of gases discharge and characteristics metallic and metalloid thin films at a deposition by ion - plasma methods are research. Head Registration Date 31-12-2006 Organization Donbass State Engineering Academy popup.description1 popup.nrat_date 2024-12-10 Close
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Head: . The interconnection between parameters of gases discharge and characteristics metallic and metalloid thin films at a deposition by ion - plasma methods are research.. Donbass State Engineering Academy. № 0106U003218
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Updated: 2026-03-23