Information × Registration Number 0107U002936, ( 0210U000247 ) R & D request Title Development of multy-magnetron unbalanced sputtering technology for superhard nanostructure coatings Head Registration Date 31-12-2007 Organization Institute for Problems in Materials Science popup.description1 popup.nrat_date 2024-12-10 Close
Head: . Development of multy-magnetron unbalanced sputtering technology for superhard nanostructure coatings.
Institute for Problems in Materials Science. № 0107U002936