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Information × Registration Number 0108U010785, R & D request Title Manufacturing of thin-film structures on the plate Head Маслов Володимир Петрович, Registration Date 18-12-2008 Organization State Enterprise "Special design and technological bureau with experimental production of V.Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine" popup.description1 popup.nrat_date 2024-12-10 Close