1 documents found
Information × Registration Number 0110U006103, ( 0210U006952  ) R & D request Title The development of plasma nanotechnology of the nanostructured aluminium and boron nitrides layers deposition for microwave devices surface protection Head Заяць Микола Сергійович, Registration Date 23-09-2010 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
search.res_rk
Head: Заяць Микола Сергійович. The development of plasma nanotechnology of the nanostructured aluminium and boron nitrides layers deposition for microwave devices surface protection. V. Lashkaryov Institute of semiconductor physics. № 0110U006103
1 documents found

Updated: 2026-03-22