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Information × Registration Number 0113U000832, ( 0213U004607  ) R & D request Title "Development of the technology for manufacturing of the holographic diffraction gratings based on the inorganic vacuum photoresists" Head Indutnyi Ivan , Доктор фізико-математичних наук Registration Date 15-03-2013 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Indutnyi Ivan . "Development of the technology for manufacturing of the holographic diffraction gratings based on the inorganic vacuum photoresists". V. Lashkaryov Institute of semiconductor physics. № 0113U000832
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Updated: 2026-03-26