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Information × Registration Number 0113U003227, ( 0213U004498  ) R & D request Title Development of the technology for deposition of nanocrystalline silicon carbide films for the production of high-stability temperature sensors on their base Head Лопін Олександр Володимирович, Registration Date 27-02-2013 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-10 Close
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Development of the technology for deposition of nanocrystalline silicon carbide films for the production of high-stability temperature sensors on their base
Head: Лопін Олександр Володимирович. Development of the technology for deposition of nanocrystalline silicon carbide films for the production of high-stability temperature sensors on their base. Institute for single crystals NASU. № 0113U003227
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Updated: 2026-03-24


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