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Information × Registration Number 0115U006717, ( 0216U006940  ) R & D request Title Making of experimental standards and research of high temperature diffusion boron and phosphorus in silicon from solid sources Head Островський Ігор Петрович, Registration Date 08-12-2015 Organization Lviv Polytechnic National University popup.description1 popup.nrat_date 2024-12-10 Close
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Making of experimental standards and research of high temperature diffusion boron and phosphorus in silicon from solid sources
Head: Островський Ігор Петрович. Making of experimental standards and research of high temperature diffusion boron and phosphorus in silicon from solid sources. Lviv Polytechnic National University. № 0115U006717
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Updated: 2026-03-27


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