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Information × Registration Number 0117U003255, ( 0218U003296  ) R & D request Title Investigation of the homogeneity of optical properties for different thicknesses of deposition of amorphous hydrogenated diamond-like carbon films Head Маслов Володимир Петрович, Registration Date 06-06-2017 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Маслов Володимир Петрович. Investigation of the homogeneity of optical properties for different thicknesses of deposition of amorphous hydrogenated diamond-like carbon films. V. Lashkaryov Institute of semiconductor physics. № 0117U003255
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Updated: 2026-03-23