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Information × Registration Number 0117U003360, ( 0218U006135  0219U004070  0220U102177  ) R & D request Title Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources. Head Bugay Oleksandr M., Кандидат фізико-математичних наук Registration Date 20-06-2017 Organization Institute of Applied Physics, NAS of Ukraine popup.description1 popup.nrat_date 2024-12-10 Close
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Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources.
Head: Bugay Oleksandr M.. Studying the Physical Processes of Discharge Formation in Low Pressure Inductively Coupled Plasma Sources.. Institute of Applied Physics, NAS of Ukraine. № 0117U003360
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Updated: 2026-03-27


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