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Information × Registration Number 0118U002181, R & D request Title Designing a multi-beam laser heterodine displacement meter for measuring nano- and micro displacement and deformation on various types of surfaces. Head Серьожкін Юрій Георгійович, Registration Date 28-08-2018 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Designing a multi-beam laser heterodine displacement meter for measuring nano- and micro displacement and deformation on various types of surfaces.
Head: Серьожкін Юрій Георгійович. Designing a multi-beam laser heterodine displacement meter for measuring nano- and micro displacement and deformation on various types of surfaces.. V. Lashkaryov Institute of semiconductor physics. № 0118U002181
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Updated: 2026-03-22


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