1 documents found
Information × Registration Number 0118U004758, ( 0218U001770  0219U100009  ) R & D request Title Development of the extreme ultraviolet interference lithography technologies for a fabrication of nanosized plasmonic structures "metallic grating-semiconductor heterostructures" and investigations of the structures as core elements of terahertz radiation sources. Head Korotyeyev Vadym , Кандидат фізико-математичних наук Registration Date 24-05-2018 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
search.res_rk
Development of the extreme ultraviolet interference lithography technologies for a fabrication of nanosized plasmonic structures "metallic grating-semiconductor heterostructures" and investigations of the structures as core elements of terahertz radiation sources.
Head: Korotyeyev Vadym . Development of the extreme ultraviolet interference lithography technologies for a fabrication of nanosized plasmonic structures "metallic grating-semiconductor heterostructures" and investigations of the structures as core elements of terahertz radiation sources.. V. Lashkaryov Institute of semiconductor physics. № 0118U004758
1 documents found

Updated: 2026-03-22


Роздрукувати цю сторінку