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Information × Registration Number 0121U110283, ( 0224U001992  ) R & D request Title Low-temperature formation of nanosized thin-film materials with shape memory effect for modern microelectromechanical systems Head Orlov Andrii K., Registration Date 02-04-2021 Organization National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute" popup.description1 Determination of low-temperature diffusion phase formation regularities in Ni/Ti film compositions with shape memory effect depending on physical and technological parameters of deposition and heat treatment, as well as the presence of additional intermediate layers (Ag, Au) and increased number of internal interfaces between nanoscale Ni and Ti layers popup.nrat_date 2024-12-09 Close
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Head: Orlov Andrii K.. Low-temperature formation of nanosized thin-film materials with shape memory effect for modern microelectromechanical systems. National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute". № 0121U110283
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Updated: 2026-03-24