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Information × Registration Number 0200U003798, 0198U003108 , R & D reports Title Investigation of nonequilibrium plasma on ArF active media and laboretion of laser emitter with electrical circulation. popup.stage_title Head Shymon L.L., Registration Date 30-10-2000 Organization Uzhgorod State University. popup.description2 The tehnique is elaborated and investigation of multielectroge corona discharge il worcing media ArF emmiters is carried out. The eximer emmiter with electrical circulation of gas is eleborated, presure and mixture composition ArF and ArF/KrF emitters are optimized. The technique was elaborated and istallation for investigation of photoasosiation processes was made up. The condittions of formation a the molecules ArF and CLF in plasma steam were investigation. Product Description popup.authors popup.nrat_date 2020-04-03 Close