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Information × Registration Number 0200U003817, 0199U001498 , R & D reports Title Development of methods for formation and research of functional layers and units of devices on new magnetic materials and surface of superconductors popup.stage_title Head Mel'nychuk I.O., Registration Date 31-10-2000 Organization Donetsk State University popup.description2 The integrating of optical spectrometer into a complex with the computer was carried out. The software for monochromator operating, recor ding of optical spectrums into file, and primary processing of spectral information was designed. The survey spectrums which accompany processes of ion-beam and plasma etching of stratums of a Cu, Fe-Ni, photoresist, silicon, silicon oxide, in atmospheres of Ar, O2 were obtained. The theoretical and experimental study of opportunities for shaping of surface relief on the HTSC films by vacuum annealing was carried out. Product Description popup.authors popup.nrat_date 2020-04-03 Close