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Information × Registration Number 0201U001400, 0100U004404 , R & D reports Title The investigation and elaboration of advanced types of vacuum-plasma equipment for thin film deposition popup.stage_title Head Prykhod'mo V. I., Registration Date 01-02-2001 Organization Scientific Center of Physical Technologies popup.description2 Проведено изучение природы скачков интенсивности ВЧ разряда, возникающих в цепи автоматических согласующих устройств генераторов. Показаны пути их предотвращения. Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
The investigation and elaboration of advanced types of vacuum-plasma equipment for thin film deposition
Head: Prykhod'mo V. I.. The investigation and elaboration of advanced types of vacuum-plasma equipment for thin film deposition. (popup.stage: ). Scientific Center of Physical Technologies. № 0201U001400
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Updated: 2026-03-26


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