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Information × Registration Number 0202U002270, 0100U000499 , R & D reports Title Development of physical and technological base for design of new generation sensors of physical values operating in various temperature ranges on the base of SOI-structure and semiconductor microcrystals popup.stage_title Head Druzhynin Anatolij Oleksandrovych, Registration Date 14-02-2002 Organization Lviv Polytechnic National University popup.description2 Properties of semiconductor microcrystals of silicon, germanium, their solid solutions, A2B6 and A4B6 compounds as well as poli-Si-on-insulator structures have been investigated with an aim of estimation a possibility for sensors on their base design. Miniature sensors, e.g., high-temperature pressure sensor operating in the temperature range 100-500°C and miniature humidity sensors were designed. Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
Development of physical and technological base for design of new generation sensors of physical values operating in various temperature ranges on the base of SOI-structure and semiconductor microcrystals
Head: Druzhynin Anatolij Oleksandrovych. Development of physical and technological base for design of new generation sensors of physical values operating in various temperature ranges on the base of SOI-structure and semiconductor microcrystals. (popup.stage: ). Lviv Polytechnic National University. № 0202U002270
1 documents found

Updated: 2026-03-25


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