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Information × Registration Number 0202U004019, 0100U000286 , R & D reports Title Mathematic simultation of eltctrohphisical processes and stuctures of microelectromechanical stnsors popup.stage_title Head Petrenko Anatolij Ivanovych, Registration Date 22-01-2002 Organization National technical university of Ukraine " KPI",Research Institute of Information Resource popup.description2 The subject of activity is creation of complex mathematical model small-sized microelectrmechanical of sensors (MEMS) with allowance for of main and destabilizing factors of influence on their main characteristics. Are developed a technique and approaches for mathematical simulation of electrophysical processes and structures МEМS. In the basis of a technique the principle of electromechanical analogies and theory of formation of models of difficult processes is fixed. The definitions and researches of the factors of influence on the main characteristics MEMS are conducted. The fragments of complex model for devices with functions of a different physical nature are created. Calculations of the characteristics of mathematical models MEMS and the check of their adequacy implemented with the help of complex of designing ALLTED for designing of devices, which constituents is МЭМС by. Product Description popup.authors popup.nrat_date 2020-04-02 Close