Search academic texts

Information × Registration Number 0203U006028, 0101U000997 , R & D reports Title Investigation of physical mechanism of surface layers and thin films structure formation by low energy ion influence popup.stage_title Head Tolok V.T., Registration Date 05-02-2003 Organization Scientific Center of Physical Technologies popup.description2 The modern state of mechanical , instrument making, electronics engineering industry makes the special increased requirements to quality of functional coatings, widely used in different areas of modern science and technique. Depending on the concrete purposes of application, there is a necessity of modification for a wide range of electrical, magnetic and mechanical properties of surface layers. One of effective methods of obtained coatings and surface layers structural parameters control is the ionic bombardment of a surface by inertial or chemically active elements with energies in the range 2-50 keV. During the bombardment period there are composite physicochemical transmutations at interaction of an ion beam with substance, which is condensed on a substrate. Depending on physical processes, which occur at interaction, sorts of ions and parameters of the beam (energy, current density), deposition rate, the substrate temperature, constructional singularities of device, essentially vary properties ofobtained functional coatings. The definition of the basic functional connections between surface layer formation conditions and their properties could allow effectively to control such parameters of coatings, as an adhesion, structure, morphology, impurity composition, etc. Product Description popup.authors popup.nrat_date 2020-04-02 Close