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Information × Registration Number 0204U005020, 0101U001858 , R & D reports Title Investigation of electrophysical properties of metal-tunneling oxide-silicon structures under the water molecules adsorbtion condition popup.stage_title Head Fastykovsky Pavel, Registration Date 24-02-2004 Organization Training, Scientific-Investigation and Production Centre, associated with the Mechnikov State University of Odessa popup.description2 The object of the research is moisture-sensitive metal-tunneling oxide-silicon structures. The aim of the work is creation of the scientific growndwork for development of humidity sensors, based on such structures. The influence of water vapour on the electrical and electrophysical parameters of the structures has been found, the relation between this parameters has been determined, and the moisture-sensitivity mechanisms have been established on the bases of the experimental and theoretical research. The dispersion of the moisture-sensitivity of the structures' capacitance has been discovered and explained. The linearity criteria of the structures' capacitance dependence on air humidity have been determined. The structures' moisture-sensitivity model has been created, and the feasibility of creation highly efficient humidity sensors based on this structures, has been established. Product Description popup.authors popup.nrat_date 2020-04-02 Close