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Registration Number

0205U006477, 0104U008910 , R & D reports

Title

Multifunctional system for diagnostic of nanostructures using of multilayer x-ray optics

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Head

Prokopenko Igor V.,

Registration Date

15-11-2005

Organization

Institute of Semiconductor Physics of National Academy of Sciences of Ukrain

Description

It is shown, that methods of the total external reflection of X-rays allow measuring parameters of a surface for samples with different type of a relief. The analysis of opportunities for application of multilayered MoB4C systems and fullerene coats in X-ray lenses manufacturing is fulfilled. The construction of the quasiclosed volume camera with the holder of a substrate cooled through thermal resistance is developed. X-ray rocking curves are gained from films superimposed at identical deposition velocities but different temperatures of the substrate holder. The model sample of X-ray lens is created.5635

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