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Information × Registration Number 0206U009292, 0104U000051 , R & D reports Title Development of the physicotechnical methods of high-speed relief microimages forming on the metal substrate popup.stage_title Head Petrov V.V., Registration Date 28-12-2006 Organization Institute for Information Recording NASU popup.description2 Metall media high-speed establishment methods based on the technologies of ion beam or electrochemical substrate etching with inorganic photoresist use for relief microstructures with micron and submicron dimensions getting were developed Product Description popup.authors popup.nrat_date 2020-04-02 Close