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Information × Registration Number 0207U002606, 0101U007146 , R & D reports Title Investigation of mechanisms and conditions for the inverse electron distribution function formation in a glow discharge with hole cathode popup.stage_title Head Shchedrin A.I., Registration Date 06-02-2007 Organization Institute of physics NASU popup.description2 Based on numerical calculations it was shown that adding of electronegative gases (SF6 and CCl4) led to an increase of electron concentration in the inverse region of the electron energy distribution function in order of 2. It was experimentally discovered that a small addition of SF6 caused significant changes in the parameters of the discharge plasma, namely increase of EEDF in the inverse region and strengthening of the discharge electric field5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close