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Information × Registration Number 0207U004937, 0103U008743 , R & D reports Title Engeneering Development of In2O3-NiO & Cr2O3-Fe2O3 thin films receivig by PEMOCVD method of sensors on CH4, CO popup.stage_title Head Маzurenko, Registration Date 25-10-2007 Organization National Academy of Scienіses of Ukraine, Council of Productive Forces Studies of Ukraine popup.description2 At thin films synthesis on the basis of In2O3-NiO and Cr2O3-Fe2O3 the technique low - temperature high-frequency CVD - synthesis and a technique a spray - pyrolysis is applied. Optimum technological modes of synthesis Cr2O3-Fe2O3 and In2O3-NiO thin films are certain. For the first time are carried out researches on influence of ultrasound on physical and chemical properties плeнок at synthesis oxide thin films by sedimentation from a gas phase on a hot substrate. Pre-production models of sensor controls on the basis of Cr2O3-Fe2O3 are received and In2O3-NiO can be used at the analysis of gases on CO and CH4. Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
Head: Маzurenko. Engeneering Development of In2O3-NiO & Cr2O3-Fe2O3 thin films receivig by PEMOCVD method of sensors on CH4, CO. (popup.stage: ). National Academy of Scienіses of Ukraine, Council of Productive Forces Studies of Ukraine. № 0207U004937
1 documents found

Updated: 2026-03-25