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Information × Registration Number 0209U001165, 0106U001512 , R & D reports Title Feature of formation, structure and interface interaction in nanoscale film multilayer compositions popup.stage_title Head Kondratenko Valerij, Registration Date 21-01-2009 Organization The Kharkov state polytechnical university popup.description2 Amorphous intermixed zones with chemical composition of MoSi2 and ScSi are formed at the interfaces in as-deposited Mo/Si and Sc/Si multilayers, correspondingly; MoSi2 and ScSi silicides grow during annealing too; silicon atoms were found to be the fastest diffusion atoms in the multilayers; ion-beam mixing at the interfaces takes place during irradiation of the Mo/Si multilayers by Ar+ ions, the thickness of intermixed zones increase. Product Description popup.authors popup.nrat_date 2020-04-02 Close