Search academic texts

Registration Number

0209U006682, 0106U008683 , R & D reports

Title

Development and manufacturing of an experimental sample of high-efficiency installation for plasma-chemical coverings of materials with use of electronic dispersion

popup.stage_title

Head

Kartmazov Gennadiy Nikolaevich,

Registration Date

23-04-2009

Organization

National Science Center "Kharkiv Institute of Physics and Technology

popup.description2

Creation of the experimental prototype of a highly efficient module-type installation for plasma-chemical coating of materials with the use of electron sputtering on the basis of the industrial installation AIR-3 equipped with new technological ion-plasma and diagnostic complexes. A pilot industrial-scale HF ionization facility has been developed and manufactured for electron-beam evaporators of power up to 100 kW, which includes a HF 13.56 MHz generator, a matching system, an inductor, a probe system and a measuring complex with computer-driven control and measurement result recording systems. A promising system of automated scanning probe has been developed to measure the space distribution of gaseous-metal plasma parameters. Design documentation has been prepared for the experimental prototype of a high-efficiency installation for plasma-chemical coating of materials. Description has been presented for the standard technological process based on the hybrid use of different devices and units, which make up the ion-plasma technological complex of different devices and units, which make up the ion-plasma technological complex of the installation.

Product Description

popup.authors

popup.nrat_date

2020-04-02