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Information × Registration Number 0209U008491, 0106U004068 , R & D reports Title Development new functional electronic components on the basis of solid-state electromechanical systems with high-speed piezoelectric management. popup.stage_title Head Yakimenko I. Yuri, Registration Date 25-05-2009 Organization Research Institute of Applied Electronics of Natoinal Technical University of Ukraine "KPI" popup.description2 Design is directed on research of processing technique and characteristics actuators on the basis of solid-state electromechanical systems. Are carried out researches piezoelectric actuator at integration into the operated dielectric resonator and the phase shifting device on a microstrip line. The technological route of manufacturing of thin-film nitride of aluminium on the basis of a method jet dc sputtering is developed. Researches of ways of inclusion of resonant elements in integrated lines передачi microwave frequency are executed. Management of characteristics of resonant elements in a wave guide with partial dielectric occupancy is fulfilled. The design of the operated dielectric resonator with a narrow air slot is developed. The air gap of the resonator changes by means of piezoelectric actuator. Designs composit piezoelectric actuator are offered and analysed. Significant movings with the big speed are received. Designs piezoelectric drives for microwave elements have the smaller sizes, wider band of operating frequencies and smaller cost. Results are recommended for using by design of solid-state resonators and actuators microelectromechanical systems. Product Description popup.authors popup.nrat_date 2020-04-02 Close