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Information × Registration Number 0212U002424, 0111U008998 , R & D reports Title Research of processes plasma chemistry and chtmical vapor deposition restoration metaine connections in the environment of active and inert gases. Synthesis and division of fluorides of metals and their connections. popup.stage_title Head Shirokov Boris Mikhajlovich, Доктор технічних наук Registration Date 23-02-2012 Organization National Science Center "Kharkiv Institute of Physics and Technology popup.description2 Processes of deposition of high density films and coverings of tungsten and molybdenum on substrates from spectral pure graphite, nickel and steels austenitic (12Х18Н10Т) and martensite-ferritic type (14Х17Н2) are investigated. It is established, that fundamental properties of films and coverings - as the phase structure, density, microhardness, concentration of impurity, porosity, a structure, a microstructure and a roughness of a surface of films and coverings depends on temperature of sedimentation, concentration of carbonyl and pressure of products of decomposition in reactionary volume, pumping speed and do not depend on a substrate material. Optimum conditions of deposition high density molybdenum and tungsten films and coverings with insignificant porosity are defined. The carbonyl method possessing high disperse ability, provides a full covering of graphite substrates even with rather deep hole. Product Description popup.authors Бакай Катерина Сергеевна Глушко Павло Іванович Дериземля Анатолій Миколайович Журавльов Олександр Юрьевич Зуєва Татьяна Миколаевна Капустін Віталій Леонідович Крохмаль Сергей Олександрович Мартиненко Віктор Григорович Осипов Олександр Давидович Патокін Олександр Петрович Пелипець Юрий Олександрович Радченко Володимир Іванович Семенов Микола Олександрович Стригуновський Сергей Олександрович Суща Аліна Анатольевна Хованський Микола Олександрович Шеремет Володимир Іванович Широков Борис Михайлович Шиян Олександр Васильович Щербакова Валентина Володимирівна popup.nrat_date 2020-04-02 Close
R & D report
Research of processes plasma chemistry and chtmical vapor deposition restoration metaine connections in the environment of active and inert gases. Synthesis and division of fluorides of metals and their connections.
Head: Shirokov Boris Mikhajlovich. Research of processes plasma chemistry and chtmical vapor deposition restoration metaine connections in the environment of active and inert gases. Synthesis and division of fluorides of metals and their connections.. (popup.stage: ). National Science Center "Kharkiv Institute of Physics and Technology. № 0212U002424
1 documents found

Updated: 2026-03-27


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