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Information × Registration Number 0212U004886, 0111U002905 , R & D reports Title Developments of novel mechanical and electrostatic nano-probe lithography and nano-manipulations techniques for nanoelectronisc and nanobiosensoric popup.stage_title Head Lytvyn Peter, Registration Date 07-02-2012 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 Prototype of the practical method for scanning probe nanolithography has been realized. Patterns are directly inscribed by surface mechanical modifications. Parameters of nanolithography process were optimized using a multi-level theoretical modeling of atomic force microscope probe interaction with surfaces of different nature. Product Description popup.authors Єфремов О.О. Литвин О.С. Литвин П.М. Прокопенко І.В. Ю.М. Литвин popup.nrat_date 2020-04-02 Close
R & D report
Developments of novel mechanical and electrostatic nano-probe lithography and nano-manipulations techniques for nanoelectronisc and nanobiosensoric
Head: Lytvyn Peter. Developments of novel mechanical and electrostatic nano-probe lithography and nano-manipulations techniques for nanoelectronisc and nanobiosensoric. (popup.stage: ). Institute of Semiconductor Physics of National Academy of Sciences of Ukrain. № 0212U004886
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Updated: 2026-03-23


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