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Information × Registration Number 0212U004943, 0110U006453 , R & D reports Title Development of metods for monitoring the quality of multilayer semiconductor nanostructures and nanomaterials in fabrication with the use of scanning microwave microscopy. popup.stage_title Head Slipchenko Nikolai, Registration Date 09-02-2012 Organization Kharkiv National University of Radioelectronics popup.description2 The analysis of the quality parameters of semiconductor multilayer nanostructures and nanomaterials, controlled in the manufacturing process, and the assessment limitations of existing methods of control and the principal features of scanning microwave microscopy performed. The methods of numerical simulation are created. The theoretical analysis and optimization of microwave resonators microprobe in order to increase sensitivity and resolution of the diagnostics of semiconductor structures are carried out. Developed and tested algorithms for determining the values of electrical parameters of a homogeneous sample by measuring the characteristics of the resonator sensor, restoring the distribution of electrical parameters in a given layer with nanoscale control of complex structures, increasing the resolution of the reconstruction method with a priori information about the geometrical and electrical characteristics of the object. Product Description popup.authors Бондаренко Ігор Миколайович Гордієнко Юрій Омелянович Гуд Юрій Іванович Мельник Сергій Іванович Полєтаєв Дмитро Олександрович Проказа Олександр Михайлович Сорока Олександр Степанович popup.nrat_date 2020-04-02 Close