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Information × Registration Number 0213U003530, 0110U005701 , R & D reports Title Development of new method of measurement of thermal kinetic coefficients of film structures, fabrication and investigation of thermal conductivity of nanothickness multilayer film structures, testing of theoretical models. popup.stage_title Head Nikolaenko Yuriy Makarovich, Registration Date 07-02-2013 Organization A.A. Galkin Physics and Engineering Institute of National Academy of Science of the Ukraine popup.description2 The main purpose of the project is development of the method for measurement of the set of thermal kinetic coefficients of film structures. The most attention was focused on the control of thermal resistance of film - substrate interface. The investigated objects were one-layer and multi-layer film structures. Film structures were prepared by the method of magnetron sputtering of ceramics target onto single crystal substrates. Practical significance of obtained results consists in possibility of fabrication of solid thermal insulating material and new functional element of microelectronics. Product Description popup.authors Медведєв Ю.В. Самольотов О.О. popup.nrat_date 2020-04-02 Close