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Information × Registration Number 0213U005345, 0108U004431 , R & D reports Title Design and establishment of multilayer diffraction grating technology for optochemical sensors popup.stage_title Head Dmitruk Mykola Leontiyovich, Registration Date 12-04-2013 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 A polarization-sensitive plasmon-polariton photodetectors and based on it optochemichal sensors has been elaborated. This photodetector designed for instant determination of polarization of the incident visible light and can be used to detect low concentrations of organic and inorganic substances in liquid and gaseous media. Selective films for such sensors have been selected with the Institute of Organic Chemistry, National Academy of Sciences. Measured sensitivity of such sensors to content acetone and ethanol vapors in the air invironment is on the level of the foreign examples. The mathematical tools for the analysis and prediction of such periodic devices and structures have been developed. The technology of hologram (interference) photolithography was elaborated using vacuum inorganic photoresists. The technology is designed to create high-relief-phase structures on the dielectric surface (glass, fused quartz, plastic) or semiconductors (GaAs, InP, Si) for the photonic sensors, spectral devices, micro-electro-mechanical systems, polarizers, polarizing filters, etc. Product Description popup.authors Індутний І. З. Коровін О. В. Мамикін С. В. Минько В.І. Соснова М. В. Шепелявий П.Є. popup.nrat_date 2020-04-02 Close