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Information × Registration Number 0214U002669, 0113U001533 , R & D reports Title Development of technology for obtaining of nanocrystalline oxide coatings (ITO, ZnO, TiO2) by pulsed magnetron and electrochemical methods. popup.stage_title Head Bazhin Anatoliy Ivanovich, Registration Date 23-01-2014 Organization Donetsk National University popup.description2 Using a new method of pulse magnetron sputtering (PMS) the thin-film coatings have been obtained and their crystal structure and optical properties were investigated. The new pulsed power supply for magnetron deposition of oxide thin film coatings in a vacuum have been developed and tested. It has been established that a significant impact on the conductivity of gallium -doped zinc oxide films plays an annealing in vacuum. The degree of crystallinity of an oxide layer significantly varies with increasing the temperature of the substrate (from amorphous to textured with <001> direction) and transmittance increases from 75 % to 85 %. The dependence of the formation of TiOx films at PMS in a gas environment Ar (80%) + O2 (20%) depending on the equilibrium conditions of deposition has been established: more equilibrium conditions lead to the formation of rutile phase films and at less equilibrium consist of rutile and brookite . The crystal and defect structure of ZnO films obtained by electrochemical deposition have been investigated and it is shown that ZnO films dopping with copper increases the size of the coherent-scattering region. Product Description popup.authors Омельянович Сергій Сергійович Ступак Володимир Аврамович Чертопалов Сергій Васильович popup.nrat_date 2020-04-02 Close