Registration Number
0215U001330,
0113U000446
, R & D reports
Title
Design, development and research of new generation of nanoscale multilayer film compositions for X-ray optics
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Head
Kondratenko Valerij,
Registration Date
12-02-2015
Organization
The Kharkov state polytechnical university
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The object of study: nanoscale multilayer coatings with nanometer and subnanometer thick layers (Sb, TaSi2, Si, C, B4C), their structural and substructural features, especially the formation of interphase boundaries. Objective: Development of physical and technological bases of creation and research of new X-ray optical elements based on nanothickness multilayer materils. . Methods: Small-angle X-ray diffraction, X-ray phase analysis, high-resolution transmission electron microscopy using the technology of cross sections, scanning electron microscopy, reflectometry in the soft X-ray range. The data about the structure, density, interlayer reacting in multilayer compositions Co/C, Sb/B4C, Si/C, W5Si3/Si, TaSi2/ Si depending on the parameters of the magnetron sputtering and annealing temperature. A description of the required distribution of the thickness of each layer in the multilayer crystal analyzer for CPM-35 and SPRUT was madeTechnological parameters of magnetron sputtering ion cutting and correctional annealing nanothickness multilayer coatings for optical elements were selected. Experimental samples of linear zone plates of the multilayer coating TaSi2/Si, broadband x-ray mirrors Sb/B4C, multilayer crystal analyzer, multilayer mirrors Sb / B4C were made, and data on their X-ray optical characteristics were obtained.The peculiarities of formation of nanoscale multilayer film compositions C/Si were determined.
Product Description
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Бугаєв Єгор Анатолійович
Девизенко Олександр Юрійович
Журавель Ігор Олександрович
Зубарєв Євгеній Миколайович
Конотопський Леонід Євгенійович
Копілець Шгор Анатолійович
Мишньова Надія Кузмінічна
Першин Юрій Павлович
Севрюков Деніс Валерійович
Севрюкова Вікторія Анатолійовна
Стесіков Ілля
Чумак Віталій
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2020-04-02
