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Information × Registration Number 0217U001432, 0115U002433 , R & D reports Title Microoptoelectromechanic devices creation for intelligent technological systems of industrial equipment and robotics popup.stage_title Head Nevliudov Ihor Sh., Registration Date 14-02-2017 Organization Kharkov national university of radioelectronics popup.description2 Subject of research: theory of the influence of scale on the basic parameters of the electrical components and processors, application of similarity theory for the creation of MEMS components, in particular the intellectual properties and the creation of modular components microminiature RF and microwave filtering The object of study: the components of MEMS technology, and other microsystem devices for intelligent control in robotics and intelligent technologies. The aim of the research work: improving productivity and quality of technological means of production by improving the scientific and practical base of manufacture of MEMS and MOEMS intelligent components for industrial equipment and industrial robots. Product Description popup.authors Бродецький Анатолій Юрійович Голіков Максим Олегович Косенко Наталія Вікторівна Палагін В.А. Разузмов-Фризюк Є.А. Сльота Андрій Федорович Теслюк Сергій Ігорович Халімов Генадій Зайдулович Чала Олена Олександрівна Ягудіна Олена В'ячеславівна popup.nrat_date 2020-04-02 Close