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Information × Registration Number 0218U001118, 0117U004869 , R & D reports Title Complex research of interaction processes between charged particles and matter popup.stage_title Head Bizyukov Ivan Alexandrovich, Registration Date 28-02-2018 Organization Kharkov National University named after V.N. Karazin popup.description2 The object of the study is gas-discharge plasma, devices for the creation of ion beams and solid-state objects for interaction with them. The purpose of the stage is the development of physical bases for the creation of model sources of hall type ions with beam focusing and Penning type with surface-active metal hydride cathodes, high-intensity planar magnetron sputtering system with a magnetically isolated sectioned anode, and also the study of diffusion processes of ion-implanted in hydrogen quartz by luminescence methods. A model source of hall-type ions with ballistic and magnetic beam focusing is developed. The study of the morphology of the textured tungsten surface as a result of the combined effect of stationary and pulsed plasma flows was studied. The dependence of luminescent radiation on the absorption dose, which is connected with oxygen deficit centers and centers of inert oxygen, is studied. The peculiarities of the work of the source of charged particles of Penning type with a metal hydride water cooled cathode in the mode of ion-stimulated desorption from hydrogen are determined. The control of operating modes of planar magnetron sputtering system with an additional antenna magnetic field created by a system of permanent magnets and magnetic circuits located outside the standard magnetron sputtering system is investigated. Product Description popup.authors І. Бізюков І. Середа В. Махлай К. Середа О. Бізюков О. Гірка С. Кононенко popup.nrat_date 2020-04-02 Close