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Information × Registration Number 0219U000010, 0118U004593 , R & D reports Title Technology for improvement of solar cell characteristics by deposition of diamond-like films popup.stage_title Head Klyui Nikolay Ivanovich, Registration Date 04-01-2019 Organization Institute of Semiconductor Physics popup.description2 During the project fulfillment optimization of technology for diamond-like carbon (DLC) films deposition has been performed and optimal technological regimes for passivation and antireflection films having refractive index up to 1.72 were determined. The films were used to improve silicon solar cell (SC) properties. It was shown that change of gas mixture content allows us to achieve the film deposition rate higher than 20 nm/min that is quite suitable to obtain antireflection films for silicon solar cells. It was shown that owing to deposition of nonstoichiometric silicon carbide film deposition (or carbo-nitride films) reflection losses for silicon and Si-based SCs may be substantially decreased in the SC photosensitivity region. The effect mentioned is observed both for polished and textured silicon. Significant improvement of the SC parameters was observed for devices produced from monocrystalline textured silicon. In particular, the SC efficiency was increased by the factor 1.11-1.14 owing to decrease not only reflection losses but passivation effect of the antireflection films as well. Product Description popup.authors Душейко Михайло Григорович Клюй Микола Іванович Лозінський Володимир Борисович Лук"янов Анатолій Миколайович Северінова Ірина Дмитрівна Темченко Володимир Павлович popup.nrat_date 2020-04-02 Close
R & D report
Head: Klyui Nikolay Ivanovich. Technology for improvement of solar cell characteristics by deposition of diamond-like films. (popup.stage: ). Institute of Semiconductor Physics. № 0219U000010
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Updated: 2026-03-25