Search academic texts

Information × Registration Number 0220U103877, 0120U104772 , R & D reports Title DSTU EN 60204-33 (EN 60204-33: 2011, IDT; IEC 60204-33: 2009 (MOD)) Electrical equipment of machines – Part 33: Requirements for semiconductor fabrication equipment. popup.stage_title Head Khaliavko Kateryna P., Registration Date 26-11-2020 Organization Scientific-Research center "Naftohim" popup.description2  The developed draft national standard 60204-33 provides a requirement for the safety of equipment for the manufacture of semiconductors, namely: performed a scientific and technical translation of the text of the European standard, developed by national structural elements and national explanations Product Description popup.authors Yefimenko Oleksij B. Sakun Vira M. Fedukh Lyudmyla M. popup.nrat_date 2020-11-26 Close